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OEM
Excimer
Lasers (Laser Systems) (Laser
Machining Services)
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T200
UV
Pulsed Excimer Laser with Intra Cavity Variable Aperture System (QUOTE)
Our more powerful T200 excimer laser is an extremely compact solution available for
integration into any system for those requiring custom
packaging. The T200 is the best in affordable excimer laser
technology. The laser comes with everything needed to
integrate into an existing system. TeoSys also offers standard
laser micromachining systems and specialized in the development of
custom laser systems according to customer specifications.
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- 157nm/193nm/248nm Wavelengths
- 1 - 500 Hz repetition rate range
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16
mJ Max Pulse Energy, 12 mJ Typical @ 193nm and depending on
repetition rate (call for other
wavelengths) (Our 248nm laser can reach 30 mJ at 100 Hz.)
- <8ns pulse width
- Ceramic / Metallic construction (no plastics)
- Integrated microprocessor laser control
- Automated (computer controlled) gas fill system
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Proprietary
Dual blower system that minimizes vibration transmitted to other
components of system. Provides
excellent beam stability with high rep rate performance.
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Voltage
and thermal monitoring system
- Patented intra-cavity gain / beam control
- Clean room compatibility
- Compact/desktop design
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Exclusive Patented Intra-Cavity Aperture System
that provides Near TM00 beam quality.
The ICVA produces a circular gaussian beam with an extremely long depth of
field.
The ICVA is ideal for thick material drilling since it produces
straighter walls, rounder holes, with better consistency when compared with
traditional extra cavity system.
The ICVA also dramatically extends laser optics lifetime by
limiting resonator gain to exactly that required to get the job done.
All other UV lasers use external devices to shape and trim the laser beam
causing premature system ware, burnt apertures, and limited UV depth of field.
The ICVA system allows the user to dynamically adjust beam size
DURING LASER FIRING. Most other
system requires extensive manipulation of the external optics to manipulate beam
size and energy. The T200 is the
only system that provides this real-time adjustment capability.
The ICVA also provides superior beam stability and longevity over
time. The ICVA specifically provides exceptional beam quality
regardless of electrode wear. Unlike
other laser systems were external apertures and optics are used to compensate
for non-symmetrical beams, the T200 with ICVA does not change divergence or beam
quality over time. This is a
significant advantage that minimizes maintenance guarantees stable performance
over the entire life of the laser head
T20
UV
Pulsed Excimer Laser with Intra Cavity Variable Aperture System
Our T20 excimer laser is a an solution for those whose
requirements which allow for a less powerful and more compact OEM excimer laser.
As with the T200 laser, the T20 is available at many different wavelengths.
Below outlines the specifications for the 193nm wavelength. Please call
for specifications for other wavelengths.
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- 157nm/193nm/248nm Wavelengths
- 1 - 35 Hz repetition rate range
- 8 mJ Max Pulse energy @ 193nm (call for other wavelengths)
- <8ns pulse width
- Ceramic / Metallic construction (no plastics)
- Patented intra-cavity infinitely variable aperture beam contro
Background
Excimer
Lasers (OEM)
All of our Excimer lasers are designed, manufactured and serviced
in house. Because we design our own lasers, we are better able
to integrate the laser into the system thereby optimizing
performance for the application and reducing overall system cost.
Our excimer lasers are small and compact but still deliver the power
and repetition rate required by many excimer jobs.
Excimer lasers generate a light beam through
production of an excited dimer, or two atom gas molecule. The
dimers utilized in excimer lasers are composed of rare gas and halogen atoms,
e.g., krypton fluoride, xenon fluoride, argon fluoride, xenon chloride. The
choice of gas mixture used in the laser determines the dimer that is formed and
wavelength of the ultraviolet laser light.
Other wavelengths can be derived from solid and gas state lasers.
Excimer Lasers - Excimer lasers have short wavelengths, short pulse durations, high
intensities and operate in the ultraviolet part of the spectrum.
They are gas lasers combining of rare gases (argon, krypton and
xenon), a halide (usually fluorine) and an inert gas (helium or neon).
The specific wavelength is determined by the combination of gas
mixture.
Most materials absorb light more strongly as the
laser optical wavelength decreases. For example, at the ArF laser
wavelength deep in the ultraviolet, oxygen absorbs the laser photons
and even air becomes weakly attenuating.
Many polymers, crystals and metals that are either highly
transmissive or highly reflective at infrared and visible wavelengths
For example, borosilicate glass, polyurethane, or silver –
absorb strongly in the ultraviolet. This allows ultraviolet lasers to
be used in cutting applications that are unsuitable for longer
wavelength sources. Some materials show dramatic changes in absorption even
within the ultraviolet.
The
figure below shows the absorption depth of PMMA at three excimer laser
wavelengths. Between the
ArF and XeF wavelengths the absorption depth of PMMA changes by a
factor of 100. At the longer 351 nm wavelength this material requires high
laser power for cutting, and the quality of the cut is poor.
At 193 nm the same material cuts cleanly with significantly
reduced power requirements.
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- materials processing and micromachining (hole drilling, etching,
marking, deposition, annealing)
- marking - both direct write and mask projection
- surface ablation (low heat affected zone)
- micromachining and medical device manufacturing
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Excimer Laser Technology for Marking
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The 193nm Excimer laser ablates a mark on the material in a
‘cold’ process. This
process does not appreciably affect the area around the mark.
In the picture below one can see that the surrounding material
shows little sign of thermal stress after exposure to laser energy.
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With most other lasers the area of thermal stress is nearly as
large as the mark itself. Having
said this, the 193nm Excimer is not completely free from thermal
effects. One must be
careful in overlapping marks at the same point, near or on a fractured
area. It is possible to
initiate a crack, or enlarge a crack with excessive energy, and
extended laser duration with some stones.
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TeoSys's Support of Systems Containing
PL1500A Lasers
TeoSys has the capability of servicing and supporting the customers
who have previously purchased Potomac Photonic's PL1500 or PL1500A
excimer lasers.
Although we are unauthorized by Potomac Photonics we have had a
successful track record of servicing the lasers and systems that
Potomac has delivered and is no longer interested in supporting.
We have retrofitted systems in the field with our T200 laser and an
adaptation kit to allow our laser to communicate with the LMT4500 or
LMS 2000 laser systems.
TeoSys is in no way affiliated with Potomac Photonics,
Inc.
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Sales: sales@teosys.com
Customer Support:
teosys@teosys.com
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